Browsing Research Articles (Physics) by Author "Oliphant, Clive J."
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Characterization of silicon nitride thin films deposited by hot-wire CVD at low gas flow rates
Oliphant, Clive J.; Arendse, Christopher; Muller, Theophillus F.G.; Knoesen, Dirk (Elsevier, 2013)We examined the chemical, structural, mechanical and optical properties of amorphous hydrogenatedsilicon nitride thin films deposited by hot-wire chemical vapour deposition using SiH4, NH3and H2gases at total flow rates ...