Browsing Research Articles (Physics) by Subject "Band gap"
Now showing items 1-1 of 1
-
Characterization of silicon nitride thin films deposited by hot-wire CVD at low gas flow rates
(Elsevier, 2013)We examined the chemical, structural, mechanical and optical properties of amorphous hydrogenatedsilicon nitride thin films deposited by hot-wire chemical vapour deposition using SiH4, NH3and H2gases at total flow rates ...